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Hf Lim

National University of Singapore

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High-performance MIM capacitor using ALD high-k HfO 2 -Al 2 O 3 laminate dielectrics

2003 IEEE Electron Device Letters
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Study of PVD HfO2 and HfOxNy as dielectrics for MIM capacitor application

2003
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High performance ALD HfO/sub 2/-Al/sub 2/O/sub 3/ laminate MIM capacitors for RF and mixed signal IC applications

2003 IEDM | International Electron Devices Meeting
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