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Richard Vincent Pearce
Richard Vincent Pearce
Materials science
Plasma-enhanced chemical vapor deposition
Composite material
Silane
Chemical engineering
2
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C2F6-based chamber clean for silane PECVD
2004
Andrew David Johnson
Richard Vincent Pearce
Mark Ian Sistern
Michael Kencel
Richard Sward
Hubert Winzig
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Remote microwave technology for chamber clean to reduce PFC emissions
1998
IEMT | International Electronics Manufacturing Technology Symposium
Laura Mendicino
S. Filipiak
P. T. Brown
John Giles Langan
Robert Gordon Ridgeway
Andrew David Johnson
Richard Vincent Pearce
Peter James Maroulis
A. Atherton
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