author-photo

A. Kh. Antonenko

Russian Academy of Sciences

4

Papers

9

Citations

Citation Trend

Filter By

Papers (2) Sort By

Journal Conference Others

Direct nitridation of silicon surface by high-density inductively coupled plasma

2012
Show All
- Source
- Cite
- Save
Citations (0)
Oxidation kinetics of a silicon surface in a plasma of oxygen with inert gases

2011 Optoelectronics, Instrumentation and Data Processing
Show All
- Source
- Cite
- Save
Citations (5)