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Thomas Mussenbrock

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Multi frequency matching for voltage waveform tailoring.

2018 arXiv: Plasma Physics
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Particle-in-Cell/Test-Particle Simulations of Technological Plasmas: Sputtering Transport in Capacitive Radio Frequency Discharges

2016 arXiv: Plasma Physics
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Kinetic simulation of the sheath dynamics in the intermediate radio-frequency regime

2013 arXiv: Plasma Physics
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Kinetic simulation of the sheath dynamics in the intermediate radio frequency regime

2013 Plasma Sources Science and Technology
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Citations (13)