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U. Zeitner
U. Zeitner
Fraunhofer Society
Optics
Lithography
Materials science
Proximity effect (audio)
Optical proximity correction
3
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Pointwise process proximity function calibration: PPFexplorer application results
2012
M. Krueger
M. Banasch
R. Galler
D. Melzer
L. E. Ramos
M. Suelzle
Ulf Weidenmueller
U. Zeitner
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Fabrication of high aspect ratio micro-structures with large depth and high resolution using lithography methods
2007
Jürgen Van Erps
M. Börner
Jürgen Mohr
U. Zeitner
Rafal Krajewski
Christof Debaes
Hugo Thienpont
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Realistic simulations of micro-lenses using experimentally measured data
2007
Youri Meuret
Heidi Ottevaere
Jürgen Van Erps
Hugo Thienpont
Norbert Lindlein
Tomasz Kozacki
Malgorzata Kujawinska
Ingo Sieber
U. Zeitner
Pierre Chavel
S. Perrot
J . Braat
S. Pereira
G. Wyrowski
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