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Timothy B. Michaelson
Timothy B. Michaelson
Optoelectronics
line edge roughness
Photoresist
Materials science
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The effects of chemical gradients and photoresist composition on lithographically generated line edge roughness
2005
Timothy B. Michaelson
Adam R. Pawloski
Alden Acheta
Yukio Nishimura
C. Grant Willson
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