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Phil Stupar
Phil Stupar
Rockwell Automation
Optoelectronics
Electronic engineering
Deep reactive-ion etching
Resonator
Hybrid silicon laser
2
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10
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Wafer-scale etch process for precision frequency tuning of MEMS gyros
2015
Dennis Y. Kim
Amir H. Behbahani
Robert T. M'Closkey
Phil Stupar
Jeffrey F. DeNatale
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Adaptive focal plane array: an example of MEMS, photonics, and electronics integration
2005
William J. Gunning
Jeff DeNatale
Phil Stupar
Robert L. Borwick
Rand Dannenberg
Robert Sczupak
Per-Olov Pettersson
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Citations (5)
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