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Vainonen‐Ahlgren E
Vainonen‐Ahlgren E
Inorganic chemistry
Medicinal chemistry
Chemistry
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HfCl4およびNH2(CH2)3Si(OC2H5)3前駆体を用いるALDによって成長させたHfSiO4誘電体層
2004
Journal of The Electrochemical Society
Rittersma Z M
Roozeboom F
Verheijen M A
Van Berkum J G M
Dao T
Snijders J H M
Vainonen‐Ahlgren E
Tois E
Tuominen M
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