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Yoshihiro Oka
Yoshihiro Oka
Renesas Electronics
Analytical chemistry
Porosity
Dielectric
Materials science
Chemical-mechanical planarization
6
Papers
13
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Structure-Modification Model of Porogen-Based Porous SiOC Film with Ultraviolet Curing
2011
Japanese Journal of Applied Physics
Yoshihiro Oka
Akira Uedono
Kinya Goto
Yukinori Hirose
Masazumi Matsuura
Masahiko Fujisawa
Koyu Asai
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New multi-step UV curing process for porogen-based porous SiOC
2009
IITC | International Interconnect Technology Conference
Kohei Seo
Yoshihiro Oka
Kotaro Nomura
Makoto Tsutsue
Etsuyoshi Kobori
Kinya Goto
Yumiko Mizukami
Toshihiro Ohtsuka
Kazuyoshi Tsukamoto
Susumu Matsumoto
Tetsuya Ueda
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Citations (2)
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