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Sophie Archambault
Sophie Archambault
Centre national de la recherche scientifique
Materials science
Nanotechnology
Plasma etching
Silicon
Lithography
7
Papers
73
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Pulsed Transfer Etching of PS–PDMS Block Copolymers Self-Assembled in 193 nm Lithography Stacks
2014
ACS Applied Materials & Interfaces
Cécile Girardot
Sophie Böhme
Sophie Archambault
Mathieu Salaün
Eddy Latu-Romain
Gilles Cunge
Olivier Joubert
M. Zelsmann
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Citations (29)
Fabrication of highly ordered sub-20 nm silicon nanopillars by block copolymer lithography combined with resist design
2013
Journal of Materials Chemistry C
Mathieu Salaün
M. Zelsmann
Sophie Archambault
Dipu Borah
N. Kehagias
Claudia Simao
O. Lorret
Matthew T. Shaw
Clivia M. Sotomayor Torres
Mickael A. Morris
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Citations (28)
Large-scale processing and graphoepitaxy of PS-b-PDMS
2012
Mathieu Salaün
S. Vayssières
Sophie Archambault
M. Zelsmann
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