Old Web
English
Sign In
Acemap
>
authorDetail
>
Shan Tang
Shan Tang
Varian Semiconductor
Analytical chemistry
Materials science
MOSFET
Sheet resistance
Doping
4
Papers
16
Citations
0.00
KQI
Citation Trend
Filter By
Interval:
1900~2024
1900
2024
Author
Papers (4)
Sort By
Default
Most Recent
Most Early
Most Citation
No data
Journal
Conference
Others
Band-Edge Work Function Obtained by Plasma Doping TiN Metal Gate for nMOS Device Application
2018
IEEE Transactions on Electron Devices
Qiuxia Xu
Wei Zou
Gaobo Xu
Shan Tang
Guilong Tao
Siamak Salimian
Jinbiao Liu
Qingqing Liang
Yao Wang
Jinjuan Xiang
Xiaolei Wang
Huilong Zhu
Junfeng Li
Chao Zhao
Deven Raj
Helen L. Maynard
Dapeng Chen
Tianchun Ye
Show All
Source
Cite
Save
Citations (4)
FinFET multi-Vt tuning with metal gate work function modulation by plasma doping
2014
IWJT | International Workshop on Junction Technology
K. Han
Jun Lee
Shan Tang
Helen L. Maynard
Naomi Yoshida
Adam Brand
Show All
Source
Cite
Save
Citations (5)
A novel plasma-based technique for conformal 3D FINFET doping
2012
IWJT | International Workshop on Junction Technology
K. Han
Shan Tang
Tyler Rockwell
Ludovic Godet
Harold Persing
Chris Campbell
S. Salimian
Show All
Source
Cite
Save
Citations (5)
Process characterization of a novel conformal FinFET doping
2012
K. Han
Shan Tang
Tyler Rockwell
Ludovic Godet
Harold Persing
Daniel Distaso
Chris Campbell
S. Salimian
Show All
Source
Cite
Save
Citations (2)
1