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I. Flohr
I. Flohr
Analytical chemistry
Chemistry
Silicon
Deep reactive-ion etching
Dry etching
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In‐situ doping of and trench‐refill with LPCVD‐poly‐silicon (I). (PH3/SiH4) ratio as a process‐controlling parameter
1989
Crystal Research and Technology
H Kühne
H. Harnisch
I. Flohr
W. Bertoldi
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