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Hsing‐Chien Ma
Hsing‐Chien Ma
Intel
Optoelectronics
Semiconductor device fabrication
Metrology
Extreme ultraviolet
Nanotechnology
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Overview of Mask Metrology
2011
Bryan J. Rice
Vibhu Jindal
C. C. Lin
Jenah Harris-Jones
Hyuk Joo Kwon
Hsing‐Chien Ma
Michael Goldstein
Yau‐Wai Chan
Frank Goodwin
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