Old Web
English
Sign In
Acemap
>
authorDetail
>
yamaguti eizin
yamaguti eizin
Substrate (chemistry)
Optoelectronics
Materials science
Semiconductor device
Thermocouple
2
Papers
0
Citations
0
KQI
Citation Trend
Filter By
Interval:
1900~2024
1900
2024
Author
Papers (2)
Sort By
Default
Most Recent
Most Early
Most Citation
No data
Journal
Conference
Others
The substrate processing apparatus, a method of manufacturing a semiconductor device, and a thermocouple support
2012
yamaguti eizin
eizin yamaguti
tetuya kosugi
ueno masaaki
masaaki ueno
Show All
Source
Cite
Save
Citations (0)
The substrate processing apparatus, the temperature control method of a substrate processing apparatus, and the heating method of the substrate processing apparatus
2011
sugiura nin
nin sugiura
ueno masaaki
masaaki ueno
tanaka kazuo
kazuo tanaka
sugisita masasi
masasi sugisita
yamaguti eizin
eizin yamaguti
kenzi sirako
Show All
Source
Cite
Save
Citations (0)
1