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Evgueni Gudimenko
Evgueni Gudimenko
Dublin City University
Atomic physics
Actinometer
Capacitively coupled plasma
Analytical chemistry
Chemistry
5
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23
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Influence of self-absorption on plasma diagnostics by emission spectral lines
2012
Optics Express
Evgueni Gudimenko
Vladimir Milosavljevic
Stephen R. Daniels
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Significance of self-absorption for emission spectral lines
2012
Bulletin of the American Physical Society
Evgueni Gudimenko
Vladimir Milosavljevic
Stephen R. Daniels
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Application of two-photon absorption laser induced fluorescence to validate actinometry measurements of absolute atomic oxygen number density based on improved EEDFs obtained from PIC simulations.
2011
Jim Conway
S Kechkar
Noel E. O'Connor
A Crowley
Evgueni Gudimenko
Miles M. Turner
Stephen R. Daniels
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Electrical characterisation of an industrial capacitively coupled plasma processing chamber for actinometry studies in Ar/O$_{2}$/SF$_{6}$ gas mixtures with global model comparisons
2010
Bulletin of the American Physical Society
Chanel Hayden
Evgueni Gudimenko
Stephen R. Daniels
David Gahan
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Global Models for Virtual Metrology and Closed Loop Process Control
2010
Bulletin of the American Physical Society
Stephen R. Daniels
Yang Zhang
Bernard Keville
Evgueni Gudimenko
Chanel Hayden
Anthony Holohan
Miles M. Turner
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