Old Web
English
Sign In
Acemap
>
authorDetail
>
Tom Kropewnicki
Tom Kropewnicki
Electronic engineering
Dielectric
Analytical chemistry
Materials science
Optoelectronics
3
Papers
9
Citations
0.00
KQI
Citation Trend
Filter By
Interval:
1900~2024
1900
2024
Author
Papers (3)
Sort By
Default
Most Recent
Most Early
Most Citation
No data
Journal
Conference
Others
Dual Substrate Orientation Integration for High Performance (110) PMOS
2006
Gauri V. Karve
White Ted
D. Eades
Mariam G. Sadaka
Greg Spencer
John J. Hackenberg
John Norbert
Tom Kropewnicki
Stefan Zollner
Pete Beckage
Jack Grant
R. Garcia
Bich-Yen Nguyen
Nigel Cave
Mark D. Hall
Jon Cheek
Suresh Venkatesan
C. T. Lin
I-Lu Wu
Show All
Source
Cite
Save
Citations (2)
Plasma charging damage characterization of 200mm and 300mm dielectric etch chambers using bias voltage diagnostic cathodes
2002
PPID | International Symposium on Plasma Process-Induced Damage
Shaming Ma
Michael C. Kutney
Semyon Kats
Tom Kropewnicki
Roger Alan Lindley
Kenny L. Doan
Keiji Horioka
Dee Lane
Hongching Shan
Show All
Source
Cite
Save
Citations (2)
Understanding the evolution of trench profiles in the via-first dual damascene integration scheme
2001
Journal of Vacuum Science and Technology
Tom Kropewnicki
Kenny L. Doan
Betty Tang
Claes Bjorkman
Show All
Source
Cite
Save
Citations (5)
1