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fuzikawa takasi
fuzikawa takasi
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スパッタ粒子の付着確率と粒子の表面拡散に及ぼす超高速基板回転の効果 | 文献情報 | J-GLOBAL 科学技術総合リンクセンター
2002
yamada takesi
fuzikawa takasi
mabuti masakatu
imamura nariaki
inoue ikuma
terada kyou otoko
kohara kouzou
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