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J. Grabmeier

5

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33

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Dependence of gate oxide integrity on grown-in defect density in Czochralski grown silicon

1999 Microelectronic Engineering
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Rapid MOS-CV Generation Lifetime Mapping Technique for the Characterisation of High Quality Silicon

1998 ESSDERC | European Solid-State Device Research Conference
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Computer Algebra in Science and Engineering

1995
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Citations (22)