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Joris D. B. J. van den Boom
Joris D. B. J. van den Boom
Mechanical engineering
Control theory
Deformation (mechanics)
Mathematics
Thermal
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Optimal Thermal Actuation for Mitigation of Heat-Induced Wafer Deformation
2019
IEEE Transactions on Control Systems and Technology
D.W.M. Veldman
R.H.B. Fey
Hans Zwart
Marc van de Wal
Joris D. B. J. van den Boom
H Henk Nijmeijer
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