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Shifu Lee
Shifu Lee
Seagate Technology
Critical dimension
Materials science
Optics
Metrology
Lithography
2
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1
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Spectroscopic ellipsometry optical critical dimension measurements of templates and imprinted resist for patterned magnetic media applications
2010
Journal of Vacuum Science & Technology. B. Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
Zhaoning Yu
Justin Hwu
Yongdong Liu
Zhenpeng Su
Henry Yang
HongYing Wang
Wei Hu
Yuan Xu
Nobuo Kurataka
Yautzong Hsu
Shifu Lee
Gene Gauzner
Kim Y. Lee
David M.-T. Kuo
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Optical critical dimension measurements for patterned media with 10's nm feature size
2009
Yongdong Liu
Milad Tabet
Jiangtao Hu
Zhaoning Yu
Justin Hwu
Wei Hu
Sha Zhu
Gene Gauzner
Kim Y. Lee
Shifu Lee
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