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Y. Demura
Y. Demura
Doshisha University
Atomic physics
Ion beam
Cold cathode
Ion implantation
Coaxial
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Development of a compaction source with a hot hollow cathode
2009
ICOPS | International Conference on Plasma Science
N. Miyamoto
Y. Demura
S. Imakita
T. Kasuya
M. Vasquez
M. Wada
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