Old Web
English
Sign In
Acemap
>
authorDetail
>
Patrick Splinter
Patrick Splinter
Axcelis Technologies
Focal length
Ion implantation
Beam (structure)
Architecture
Ion beam
1
Papers
5
Citations
0
KQI
Citation Trend
Filter By
Interval:
1900~2024
1900
2024
Author
Papers (1)
Sort By
Default
Most Recent
Most Early
Most Citation
No data
Journal
Conference
Others
Optima HD: Single Wafer Mechanical Scan Ion Implanter
2006
Patrick Splinter
Michael A. Graf
Christopher Godfrey
Yongzhang Huang
D. Polner
J. Danis
K. Ota
Show All
Source
Cite
Save
Citations (5)
1