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H.L. Shi
H.L. Shi
Hebei University of Technology
Dielectric
Composite material
Abrasive
Polishing
Chemical-mechanical planarization
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Study on CMP Slurry and Technique of Silicon Dioxide Dielectric for ULSI
2008
Key Engineering Materials
Bai Mei Tan
J.Y. Yuan
Xinhuan Niu
H.L. Shi
Yu Ling Liu
Chun-xiang Cui
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