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Chao Ye
Chao Ye
Chinese Academy of Engineering
Thin film
High-power impulse magnetron sputtering
Microstructure
Surface roughness
Sputter deposition
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Superiority of high power impulse magnetron sputtering in niobium films deposition on copper
2018
Weiwei Tan
Bo Li
Xiangyang Lu
Li Xiao
Boting Li
Deyu Yang
Yujia Yang
Chao Ye
Datao Xie
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