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ikkou nakamura
ikkou nakamura
Materials science
Reticle
Optics
Environmental science
Electron-beam lithography
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C-11-3 グリッドパターン転写方式におけるMOSFETの省面積化設計(C-11. シリコン材料・デバイス, エレクトロニクス2)
2005
satosi wakimoto
takehiko wakasugi
kikki iwasaki
meiryou nakada
hirosi kubota
ikkou nakamura
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C-11-5 Development of Reticle Free Exposure System
2003
taturou morimoto
takayuki sekidou
sinzi matuoka
meiryou nakada
hirosi kubota
ikkou nakamura
kouzi kosaka
tuneo inokuti
bojieneiye
tosio fuzii
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Electron beam lithography apparatus, and an electron beam lithography method
1992
ikkou nakamura
tikara nama tomi kiti
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超微細電子ビ-ム描画装置"HL-700F"
1988
yosio saitou
ikkou nakamura
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