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Don Croft
Don Croft
Raytheon
Actuator
Thin film
Silicon on insulator
Power density
Microelectromechanical systems
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Miniature thin-film NiTi hydraulic actuator with MEMS microvalves
2005
Geoff McKnight
Leslie A. Momoda
Don Croft
Dong Gun Lee
Daniel Shin
Greg P. Carman
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