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M Clark

SEMATECH

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Elemental Quantification of Hafnium–Silicates by Electron Energy Loss Spectroscopy

2006 Microscopy and Microanalysis
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Physical Characterization of Novel Metal Electrodes for Hf‐based Transistors

2005 Characterization and Metrology for ULSI Technology
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Physical Properties of Hafnium-Silicate Transistor Gate Dielectric Stacks after Thermal Processing

2005 Microscopy and Microanalysis
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