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O. Schwarzelbach
O. Schwarzelbach
Fraunhofer Society
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Microelectromechanical systems
Electronic engineering
Control engineering
Inertial measurement unit
4
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33
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MEMS scanning laser projection based on high-Q vacuum packaged 2D-resonators
2011
Ulrich Hofmann
C. Eisermann
Hans Joachim Quenzer
Joachim Janes
C. Schroeder
O. Schwarzelbach
Björn Jensen
Lars Ratzmann
Thorsten Giese
Frank Senger
J. Hagge
Manfred Weiss
B. Wagner
W. Benecke
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Citations (11)
A novel vacuum-packaged low-power scanning mirror with inclined 3D-shaped window
2011
TRANSDUCERS | International Conference on Solid-State Sensors, Actuators and Microsystems
Ulrich Hofmann
Hans Joachim Quenzer
C. Eisermann
Joachim Janes
C. Schroeder
Björn Jensen
J. Hagge
F. Soerensen
Frank Senger
D. Vick
O. Schwarzelbach
Lars Ratzmann
Thorsten Giese
B. Wagner
W. Benecke
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Citations (2)
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