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P. Lippens
P. Lippens
IMEC
Instability
Materials science
Analytical chemistry
Doping
Polycide
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Degradation of the Poly-Si/Silicide Structure in Advanced MOS-Technologies
1988
ESSDERC | European Solid-State Device Research Conference
P. Lippens
Karen Maex
L. Van Den Hove
R. De Keersmaecker
Volker Probst
W. Koppenolc
W. F. van der Weg
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