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C. M. Yang
C. M. Yang
Tohoku University
Materials science
Metalorganic vapour phase epitaxy
Optics
Sapphire
Nitride
9
Papers
44
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Growth of AlN film on Mo/SiO/sub 2//Si (111) for 5 GHz-band FBAR using MOCVD
2004
IUS | Internaltional Ultrasonics Symposium
C. M. Yang
Kazuhiro Uehara
Y. Aota
Seong-Kweon Kim
Suguru Kameda
Hiroyuki Nakase
Yoji Isota
Kazuo Tsubouchi
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Fabrication of 5-GHz-band SAW filter with atomically-flat-surface AlN on sapphire
2004
IUS | Internaltional Ultrasonics Symposium
Kazuhiro Uehara
C. M. Yang
Tomohiko Shibata
Seong-Kweon Kim
Suguru Kameda
Hiroyuki Nakase
Kazuo Tsubouchi
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Citations (23)
Highly c-axis-oriented AlN film using MOCVD for 5GHz-band FBAR filter
2003
SU | IEEE Symposium on Ultrasonics
C. M. Yang
Kazuhiro Uehara
Seong-Kweon Kim
Suguru Kameda
Hiroyuki Nakase
Kazuo Tsubouchi
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Citations (17)
Highly c-axis-oriented AlN film using MOCVD for 5GHz-band FBAR filter
2003
C. M. Yang
Kazuhiro Uehara
Seong-Kweon Kim
Suguru Kameda
Hiroyuki Nakase
Kazuo Tsubouchi
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AlN epitaxial film with atomically flat surface for GHz-band saw devices
2002
Kazuhiro Uehara
C. M. Yang
Hiromichi Nakamura
Suguru Kameda
Hiroyuki Nakase
Kazuo Tsubouchi
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