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A. E. Leventsov
A. E. Leventsov
Ivanovo State University of Chemistry and Technology
Physics
Atomic physics
Reactive-ion etching
Etching
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Kinetics and modes of plasmachemical etching of GaAs under conditions of induction HF discharge in CF2Cl2
2014
Russian Microelectronics
A. M. Efremov
D. B. Murin
A. E. Leventsov
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Citations (4)
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