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Shin ichi Wakana

Waseda University

3

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38

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ANALYSIS OF RADIAL DISTRIBUTION OF PLASMA PARAMETERS IN A COAXIAL-LINE MICROWAVE DISCHARGE TUBE.

1983 Journal of Applied Physics
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A New Microwave Plasma Chemical Vapour Deposition System

1983 Shinku
- Isamu Kato
- Shin ichi Wakana
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MICROWAVE PLASMA CVD SYSTEM FOR THE FABRICATION OF THIN SOLID FILMS.

1982 Japanese Journal of Applied Physics
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