Old Web
English
Sign In
Acemap
>
authorDetail
>
H. Ur Rahman
H. Ur Rahman
University of New South Wales
Ellipsometry
Thin film
Silicon nitride
Analytical chemistry
Microelectromechanical systems
1
Papers
6
Citations
0.00
KQI
Citation Trend
Filter By
Interval:
1900~2024
1900
2024
Author
Papers (1)
Sort By
Default
Most Recent
Most Early
Most Citation
No data
Journal
Conference
Others
Characterisation of dielectric properties of PECVD Silicon Nitride for RF MEMS applications
2008
IMC | IEEE International Multitopic Conference
H. Ur Rahman
Angus Gentle
E. Gauja
Rodica Ramer
Show All
Source
Cite
Save
Citations (6)
1