Old Web
English
Sign In
Acemap
>
authorDetail
>
Alexander Buettner
Alexander Buettner
KLA-Tencor
Metrology
Immersion lithography
Phase (waves)
Robustness (computer science)
Electronic engineering
1
Papers
1
Citations
0
KQI
Citation Trend
Filter By
Interval:
1900~2024
1900
2024
Author
Papers (1)
Sort By
Default
Most Recent
Most Early
Most Citation
No data
Journal
Conference
Others
LMS IPRO: enabling accurate registration metrology on SiN-based phase-shift masks
2017
Hendrik Steigerwald
Runyuan Han
Alexander Buettner
Klaus-Dieter Roeth
Show All
Source
Cite
Save
Citations (1)
1