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Juanita Jones
Juanita Jones
University of California, Berkeley
Extreme ultraviolet lithography
Optics
Resist
Materials science
Chemistry
6
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3
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0
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Influence of base and PAG on deprotection blur in EUV photoresists and some thoughts on shot noise
2008
Lawrence Berkeley National Laboratory
Juanita Jones
Christopher L. Anderson
Patrick P. Naulleau
Demitra Niakoula
Elsayed Hassanein
Robert L. Brainard
Gregg M. Gallatin
Kim Dean
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Analysis of Optics and Mask Contamination in SEMATECH EUV Micro-Exposure Tools
2007
Juanita Jones
Andrea Wüest
E. Langer
Chihcheng Lin
Matt Malloy
Patrick P. Naulleau
Uzo Oko
Erik Sohmen
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A Comparison of Photoresist Resolution Metrics using 193 nm and EUV Lithography
2007
Juanita Jones
Piyush Pathak
Thomas Wallow
Bruno M. LaFontaine
Yunfei Deng
Ryoung-han Kim
Jongwook Kye
Harry J. Levinson
Patrick Naulleau
Christopher N. Anderson
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