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James Connolly

Applied Materials

8

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87

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Tertiarybutylarsine damage-free thin-film doping and conformal surface coverage of substrate-released horizontal Si nanowires

2020 Applied Surface Science
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Diagnosis of phosphorus monolayer doping in silicon based on nanowire electrical characterisation

2018 Journal of Applied Physics
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AsH3 gas-phase ex situ doping 3D silicon structures

2018 Journal of Applied Physics
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Phosphorus monolayer doping (MLD) of silicon on insulator (SOI) substrates

2018 Beilstein Journal of Nanotechnology
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