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kouta atuzi
kouta atuzi
Composite material
Materials science
Lithography
Semiconductor
Copolymer
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Method for producing a copolymer for semiconductor lithography
2003
takahiro nakamura
kouta atuzi
ti oikawa
masaaki muroi
takanori yamagisi
masakazu yamada
kensuke saisyo
yuu takesita
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