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B. Fares

Institut national des sciences Appliquées de Lyon

5

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Deconvolution of very low primary energy SIMS depth profiles

2006 Applied Surface Science
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AFM study of the SIMS beam induced roughness in monocrystalline silicon in presence of initial surface or bulk defects of nanometric size

2006 Applied Surface Science
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Surface roughening and erosion rate change at low energy SIMS depth profiling of silicon during oblique O2+ bombardment

2006 Applied Surface Science
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Analysis of a B4C/Mo/Si multilayer interferential mirror by SIMS: influence of the sputtering ion

2006 Surface and Interface Analysis
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Influence of surface orientation on the formation of sputtering-induced ripple topography in silicon

2004 Applied Surface Science
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Citations (8)