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Shogo Obara
Shogo Obara
Wafer
Chemistry
O-ring
Plasma parameters
Elastomer
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Study on CF4/O2 plasma resistance of O-ring elastomer materials
2020
Journal of Vacuum Science and Technology
Tetsuya Goto
Shogo Obara
Tomoya Shimizu
Tsuyoshi Inagaki
Yasuyuki Shirai
Shigetoshi Sugawa
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