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Bong Ha Shin
Bong Ha Shin
Polymer
Extreme ultraviolet
Resist
Optics
Polymer blend
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The factors affecting improvement sensitivity, CDU, and resolution in EUV resist
2014
Proceedings of SPIE
Joon Hee Han
Hyun Soon Lim
Jin-Ho Kim
Sumi Choi
Jin Bong Shin
Chang Wan Bae
In Young Yoo
Bong Ha Shin
Eun Kyo Lee
Hyun Sang Joo
Dong-Chul Seo
Jun Sung Chun
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