Old Web
English
Sign In
Acemap
>
authorDetail
>
tuyosi ootubo
tuyosi ootubo
Excimer
Ultraviolet
Irradiation
Wafer
Photochemistry
1
Papers
0
Citations
0
KQI
Citation Trend
Filter By
Interval:
1900~2024
1900
2024
Author
Papers (1)
Sort By
Default
Most Recent
Most Early
Most Citation
No data
Journal
Conference
Others
Deoxidation of a SiO_2 layer on a silicon wafer by vacuum ultraviolet excimer irradiation
2001
teppei higasi
makoto takaura
sigeki itou
tuyosi ootubo
takesi higasiguti
syouiti kubodera
kou sasaki
Show All
Source
Cite
Save
Citations (0)
1