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Y. Ide
Y. Ide
North Carolina State University
Chemical vapor deposition
Atomic layer epitaxy
Gallium arsenide
Chemistry
Doping
2
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54
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Recent progress in atomic layer epitaxy of III–V compounds
1988
Journal of Crystal Growth
S. M. Bedair
B. T. McDermott
Y. Ide
N. H. Karam
H. Hashemi
M. A. Tischler
M.L. Timmons
J. C. L. Tarn
N.A. El Masry
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Citations (30)
Sidewall growth by atomic layer epitaxy
1988
Applied Physics Letters
Y. Ide
B. T. McDermott
M. Hashemi
S. M. Bedair
W. D. Goodhue
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Citations (24)
1