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Robert L. Bristol
Robert L. Bristol
Materials science
Optics
Extreme ultraviolet lithography
Nanotechnology
Lithography
3
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Lithographic stochastics: beyond 3σ
2017
Robert L. Bristol
Marie Krysak
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Characterization of collector optic material samples before and after exposure in LPP and DPP EUV sources
2005
Huatan Qiu
Darren A. Alman
Keith C. Thompson
M.D. Coventry
Joshua B. Spencer
Matthew R. Hendricks
Erik L. Antonsen
Brian E Jurczyk
David N. Ruzic
T. Spila
Ginger Edwards
Stefan Wurm
Obert Wood
Robert L. Bristol
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Evaluating advanced fuel candidates in surface cleaning of optics by plasma exposure (SCOPE)
2005
M. J. Neumann
H. Shin
Huatan Qiu
E. Ritz
R. A. DeFrees
M.R. Hendricks
Darren A. Alman
Brian E Jurczyk
David N. Ruzic
Robert L. Bristol
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