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Ulrich Matejka
Ulrich Matejka
Carl Zeiss AG
Optics
Physics
Engineering
Extreme ultraviolet lithography
Metrology
6
Papers
3
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0
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Abbildende optik für ein metrologiesystem zur untersuchung einer lithographiemaske
2015
Johannes Ruoff
Ralf Müller
Susanne Beder
Ulrich Matejka
Hans-Jürgen Mann
Jens Timo Neumann
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A process for the preparation of a spatially resolved image data set for a subsequent Fourier transform intensity
2015
Ulrich Matejka
Dietmar Schnier
Carsten Schmidt
Mario Längle
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A method for three-dimensional measurement of a 3D image of a lithography mask air
2014
Ulrich Matejka
Christoph Husemann
Johannes Ruoff
Sascha Perlitz
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AIMS EUV first light imaging performance
2014
Anthony Garetto
Renzo Capelli
Krister Magnusson
Jan Hendrik Peters
Sascha Perlitz
Ulrich Matejka
Dirk Hellweg
Markus Weiss
Michael Goldstein
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Illumination optics for a metrology system and metrology system with such illumination optics
2013
Holger Seitz
Dirk Doering
Thomas Frank
Mario Längle
Ulrich Matejka
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Status of the AIMS(TM) EUV Project
2012
Anthony Garetto
Jan Hendrik Peters
Sascha Perlitz
Ulrich Matejka
Dirk Hellweg
Markus Weiss
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