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B. Schlayen
B. Schlayen
Spectrum analyzer
Ellipsometry
Frequency modulation
Detector
Analog signal
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Design Of A New In Situ Spectroscopic Phase Modulated Ellipsometer
1990
Bernard Drevillon
J.Y. Parey
M. Stchakovsky
R. Benferhat
Y. Josserand
B. Schlayen
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