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P. Jones
P. Jones
Lam Research
Langmuir probe
Analytical chemistry
Atom
Plasma
Critical value
1
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39
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Effects of atomic chlorine wall recombination: Comparison of a plasma chemistry model with experiment
1995
Journal of Vacuum Science and Technology
E. Meeks
J. W. Shon
Y. Ra
P. Jones
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Citations (39)
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