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Eul Taek Lee
Eul Taek Lee
Nuclear magnetic resonance
Dry etching
Dielectric
Gate dielectric
Etching (microfabrication)
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Characteristics of Hf-silicate Interfacial Layers Formed by Wet Etching
2009
Journal of the Korean Physical Society
Jae-Kyoung Park
Eul Taek Lee
Byoung-Kyun Kim
Seok Won Jeong
Yonghan Roh
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