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S. M. Tang
S. M. Tang
University of Notre Dame
Amorphous solid
Chemical vapor deposition
Annealing (metallurgy)
Grain growth
Radiochemistry
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Recrystallization by rapid thermal annealing of implanted low‐pressure chemical‐vapor‐deposited amorphous Si films
1987
Journal of Applied Physics
N. S. Alvi
S. M. Tang
R. Kwor
M. R. Fulcher
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