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Ilhyeong Lee
Ilhyeong Lee
Ion beam
Etching
ion beam etching
Optics
Telecommunications
2
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A study on the ion beam etching characteristics in the high aspect ratio contact
2016
Ilhyeong Lee
Jong-Kyu Kim
Jongsoon Park
Woohyun Lee
Jong-Chul Park
Seok-Woo Nam
Ho-Kyu Kang
Es Jung
Kyoungsub Shin
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A study on the phenomenon of non uniformity at isolate pattern using ion beam etching
2016
Jongsoon Park
Jong-Kyu Kim
Sangkuk Kim
Woohyun Lee
Ilhyeong Lee
Jong-Chul Park
Kyongsub Shin
Ho-Kyu Kang
Es Jung
Seok-Woo Nam
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