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K. Sharma
K. Sharma
Lam Research
Materials science
Chemical engineering
Selectivity
Molecule
Atomic layer deposition
3
Papers
1
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0
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Selective deposition of AlOx for Fully Aligned Via in nano Cu interconnects
2021
IITC | International Interconnect Technology Conference
Son Van Nguyen
Hosadurga Shobha
Peethala Cornelius Brown
Thomas J. Haigh
Huai Huang
Jinghong Li
James J. Demarest
Balasubramanian S. Pranatharthi Haran
Dennis M. Hausmann
Lemaire Paul C
K. Sharma
P. Ramani
Arpan Mahorowala
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Insight into the removal and reapplication of small inhibitor molecules during area-selective atomic layer deposition of SiO2
2021
Journal of Vacuum Science and Technology
Marc J. M. Merkx
Rick G. J. Jongen
A. Mameli
Lemaire Paul C
K. Sharma
Dennis M. Hausmann
Wilhelmus M. M. Kessels
Adriaan J. M. Mackus
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Mechanism for growth initiation on aminosilane-functionalized SiO2 during area-selective atomic layer deposition of ZrO2
2021
Journal of Vacuum Science and Technology
Wanxing Xu
Lemaire Paul C
K. Sharma
Ryan J. Gasvoda
Dennis M. Hausmann
Sumit Agarwal
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